This thesis delves into the creation and deployment of a compact, reliable, and biocompatible flexible capacitive force sensor, addressing a discernible deficiency in commercially available biomedical engineering sensors, such as Force Sensing Resistors (FSR), with a repeatability range of 2 to 2.5% within specific sensing ranges and a part-to-part repeatability of 6-40%. In applications like soft robotics, Force Myography and gesture recognition devices the necessity for highly repeatable sensors is crucial. The proposed force sensor is designed to be customizable regarding parameters such as force range, sensitivity, linearity, resolution, and response time. The study explores interdigital configurations of flexible capacitive pressure sensors, subjecting them to theoretical analysis and modelling.

The subsequent phase concentrates on fabricating the proposed sensor, adopting a novel and simple fabrication approach that eliminates the need for a sacrificial layer. Semiconductor manufacturing techniques play a pivotal role in ensuring outstanding reproducibility and enhanced durability, especially on flexible substrates. Subsequently, A comprehensive assessment of these sensors covers characteristics such as range, sensitivity, linearity, hysteresis, repeatability, dynamic response. Notably, the sensor achieves a customizable force range of 0.2–20 N, a maximum sensitivity of 32.44% /N, and rapid response and relaxation times of 60 ms, demonstrating exceptional repeatability ( 0.49%), reduced hysteresis, and good linearity (81.36%).

This research expands the potential applications by conceptualizing and assessing various sensors beyond the fundamental interdigitated design. An effort is made to devise an array of sensors to enhance the sensor's functionality. The exploration of potential uses, supported by a sensor array model, broadens the scope for significant advancements in biomedical engineering, force myography, and soft robotics, offering diverse applications. In conclusion, the thesis aims to introduce a resource-efficient, easily manufacturable, reliable, cost-effective, and adaptable flexible force sensor. Subsequently, this research culminated in the establishment of a startup named NeuroHaptics, which received seed funding from New Rummy Pravartak Technologies Foundation.